In-situ analysis of metal atom, metal ion and argon ion fluxes in industrial magnetron sputtering with Al, Cr and AlCr targets

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Peter Klein, Jaroslav Hnilica, Mojmír Jílek, Mayur Khan, Anna Macková, Petr Vašina

DOI: 10.2139/ssrn.6048211

Cited by: 0

References: 38

Fields of Study & Subjects

Metal and Thin Film Mechanics Ion-surface interactions and analysis Fusion materials and technologies

References 38