Effect of substrate temperature on properties and emission mechanism of erbium oxide prepared by plasma enhance atomic layer deposition

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Xiaoying Zhang, Ye-Lan Li, Yonghao Luo, Yi-Fan Tang, Yu-Jiao Ruan, Shui-Yang Lien

DOI: 10.2139/ssrn.6048213

Cited by: 0

References: 27

Fields of Study & Subjects

Silicon Nanostructures and Photoluminescence Semiconductor materials and devices Glass properties and applications

References 27