Research on the Chemical mechanical polishing Efficiency of Quartz Wafer with Colloidal Silica Adsorbed Ceria Composite Abrasives

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Kang Chen, Baoguo Zhang, Jiakun Song, Yuepeng Wang, Shitong Liu, Wenhao Xian, Sihui Qin, Yaqin Li

DOI: 10.2139/ssrn.6049790

Cited by: 0

References: 13

Fields of Study & Subjects

Advanced Surface Polishing Techniques Mineral Processing and Grinding Minerals Flotation and Separation Techniques

References 13