Probing the Two-Step Scratching of Silicon Carbide Atomic Layers via Molecular Dynamics: The Roles of Mechanical Pre-Damage and Chemical Reactions

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Xue Li, Yuzhen Liu, Jun Li, Jiapeng Chen, Tao Sun, Yongwei Zhu, Xu Sw, Weimin Liu

DOI: 10.2139/ssrn.6052612

Cited by: 0

References: 12

Fields of Study & Subjects

Advanced Surface Polishing Techniques Diamond and Carbon-based Materials Research Advanced ceramic materials synthesis

References 12