Synergistic inhibiting effect of 1,2,4-Triazole and Potassium Molybdate on Molybdenum in Chemical Mechanical Polishing

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Jiakun Song, Baoguo Zhang, Kang Chen, Yuepeng Wang, Shitong Liu, Wenhao Xian, Jiawei Wu, Sihui Qin

DOI: 10.2139/ssrn.6052865

Cited by: 0

References: 20

Fields of Study & Subjects

Advanced Surface Polishing Techniques Silicon and Solar Cell Technologies Advanced Machining and Optimization Techniques

References 20