Structural evolution and optical degradation of PBL1Y i-line glass under low energy electron irradiation

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Chengyu Hou, Ziyi Ge, Yiping Li, Baoxing Xiong, Xiang Zhang, Xiao Ya Yuan, Cunding Liu

DOI: 10.2139/ssrn.6055158

Cited by: 0

References: 38

Fields of Study & Subjects

Glass properties and applications Advancements in Photolithography Techniques Laser Material Processing Techniques

References 38