Controlling Temporal Plasma Dynamics for Growing Near-Epitaxial C-Axis-Oriented GaN Thin Films on Si (111) Substrates through Pulsed DC Magnetron Sputtering

SSRN Electronic Journal 2026 Preprint Open access

Read full text

Authors: Wei-Sheng Liu, Li-Cheng Huang, Deveshwar Sasikumar, Kuo-Jui Hu, Jium-Yi Ye, Balaji Gururajan

DOI: 10.2139/ssrn.6096582

Cited by: 0

References: 31

Fields of Study & Subjects

GaN-based semiconductor devices and materials Metal and Thin Film Mechanics Acoustic Wave Resonator Technologies

References 31