Quasi-epitaxial Growth of Aluminum Nitride Films on (0002)-oriented Titanium Buffer Layer by Magnetron Sputtering

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Jing Sun, Ruoyuan Xie, Can Sheng, Pan Xu, Shaoqing Xu, Chao Ma, Xueyun Wang, Jiawang Hong, Bin Yang
DOI: 10.2139/ssrn.6104011
Cited by: 0
References: 38

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Metal and Thin Film Mechanics Ferroelectric and Piezoelectric Materials

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint