Low Loss and High Efficiency Laser Slicing Method for 4H-SiC Based on Modified-Unit and Investigation of Crack Evolution

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Quanli Wang, Wanqin Zhao, Shibo Song, Xisheng Luo, Xuesong Mei
DOI: 10.2139/ssrn.6139616
Cited by: 0
References: 22

Fields of Study & Subjects

Silicon Carbide Semiconductor Technologies Laser Material Processing Techniques Advanced Surface Polishing Techniques

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint