Impact of O Concentration on the Thermal Stability and Decomposition Mechanism of (Cr, Al)N Compared to (Ti, Al)N Thin Films

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Pauline Kümmerl, Ganesh Kumar Nayak, Felix Leinenbach, Zsolt Czigány, Daniel Primetzhofer, S. Kolozsvári, Peter Polcik, Marcus Hans, Jochen M. Schneider
DOI: 10.2139/ssrn.6144708
Cited by: 0

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced ceramic materials synthesis GaN-based semiconductor devices and materials

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint