Fourier transform infrared spectroscopy of silicon nitride thin films deposited by PECVD

SSRN Electronic Journal 2026 Preprint Open access

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Authors: İpek Guler
DOI: 10.2139/ssrn.6144749
Cited by: 0
References: 25

Fields of Study & Subjects

Semiconductor materials and devices Copper Interconnects and Reliability Metal and Thin Film Mechanics

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint