STUDY OF ATOMIC LAYER DEPOSITED METAL OXIDES AS ADHESION LAYER FOR PLATINUM ONTO THERMAL SILICON DIOXIDE

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Gabriel Moagăr‐Poladian, Florin Năstase, Gabriel Crăciun, Cǎtǎlin Corneliu Pârvulescu, Victor Moagăr-Poladian, Octavian‐Gabriel Simionescu
DOI: 10.2139/ssrn.6145977
Cited by: 0

Fields of Study & Subjects

Semiconductor materials and devices Copper Interconnects and Reliability Semiconductor materials and interfaces

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint