Kinetic Monte Carlo Simulation of (010) β‑Ga₂O₃ Growth via Metalorganic Chemical Vapor Deposition
Fields of Study & Subjects
Ga2O3 and related materials
Semiconductor materials and devices
Electronic and Structural Properties of Oxides
Publication details
- Journal / source
- SSRN Electronic Journal
- Publication date
- 1 January 2026
- Document type
- Preprint