Evolution mechanism of (100) diamond etch pits and dislocations

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Guozhao Ren, Shuai Xu, Feitong Ren, Zichen Zhao, Sijia Hao, Xiaolu Yuan, Liangxian Chen, Jinlong Liu, Junjun WEI, Chengming Li
DOI: 10.2139/ssrn.6153641
Cited by: 0

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Advanced Surface Polishing Techniques Silicon Carbide Semiconductor Technologies

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Document type
Preprint