A Scalable Piezoelectric Vertical Sidewall Architecture for In-Plane Multi-GHz NEMS Resonators

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Artem Gabrelian, Glenn Ross, Mervi Paulasto‐Kröckel

DOI: 10.2139/ssrn.6170072

Cited by: 0

References: 27

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators

References 27