Shape-Configuration Parameters for Sensitivity–Frequency Optimization of MEMS Piezoresistive Vector Hydrophones

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Wael A. Moussa, Mazhar B. Tayl, Hasssan Kheirallah, Ahmed ElMasry

DOI: 10.2139/ssrn.6189502

Cited by: 0

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Acoustic Wave Resonator Technologies Mechanical and Optical Resonators