Defect Regulation and Subsurface Damage Suppression in GaAs Nanogrinding Through Optimized Double-Grit Sequential Depth Allocation

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Yin Huang, Wei Han, Xiaohua Hu, Tao Yu, Yulin Wang, MinHao Zhu
DOI: 10.2139/ssrn.6211297
Cited by: 0
References: 16

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Laser Material Processing Techniques

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Language
EN
Document type
Preprint