In-situ electron-beam induced current mapping of the uniformity of thin-film conductivity

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Isaac Appelquist Løge, Håkon Kristiansen, Nadia Shardt, Tore Sandnes Vehus
DOI: 10.2139/ssrn.6232767
Cited by: 0
References: 4

Fields of Study & Subjects

Electron and X-Ray Spectroscopy Techniques Integrated Circuits and Semiconductor Failure Analysis Advanced Electron Microscopy Techniques and Applications

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Language
EN
Document type
Preprint