Near Surface Modification of Polycrystalline Diamond for Heterogeneous Integration Applications

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Xiaoxuan Li, Xueyi Duan, X H Wang, Ruyan Kang, Wenqi Jia, Zhiyuan Zuo
DOI: 10.2139/ssrn.6237960
Cited by: 0
References: 22

Fields of Study & Subjects

Diamond and Carbon-based Materials Research 3D IC and TSV technologies Silicon Carbide Semiconductor Technologies

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Language
EN
Document type
Preprint