Zeolite Y nanoparticles as efficient abrasive for chemical mechanical planarization of SiC wafer

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Yanfeng Zhang, Chenxi Dai, Wenrui Ma, Zhiyuan Zhang, Xinxin Huang, Mingxuan Wang, Ruiting Feng
DOI: 10.2139/ssrn.6239038
Cited by: 0
References: 32

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Erosion and Abrasive Machining

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Language
EN
Document type
Preprint