Preparation of (Ga1-xInx)2O3 MSM deep-UV photodetectors by atomic layer deposition

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Jianhong Wang, Tao Lin, Yantao Liu, Jiale Dang, Tai Chen

DOI: 10.2139/ssrn.6253065

Cited by: 0

References: 26

Fields of Study & Subjects

Ga2O3 and related materials 2D Materials and Applications Semiconductor materials and devices

References 26