Non-destructive three-dimensional defect mapping in silicon carbide focus ring using optical coherence tomography

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Tinaya Wijethunge, Daewoon Seong, Sangyeob Han, Sm Abu Saleah, Jannat Amrin Luna, Nipun Shantha Kahatapitiya, Naresh Kumar Ravichandran, Ruchire Eranga Wijesinghe, Mansik Jeon, Jeehyun Kim
DOI: 10.2139/ssrn.6350973
Cited by: 0

Fields of Study & Subjects

Optical Coherence Tomography Applications Industrial Vision Systems and Defect Detection Optical measurement and interference techniques

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Language
EN
Document type
Preprint