Transferring Resist Sheet with Latent Image for Fine Patterning on 3D Sample with Curvature and Depth

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Minoru Sasaki, Takayuki Kuroyanagi, Shigenori Saito

DOI: 10.2139/ssrn.6379689

Cited by: 0

References: 8

Fields of Study & Subjects

Advancements in Photolithography Techniques Nanofabrication and Lithography Techniques Advanced optical system design

References 8