Low-Energy Oxygen Ion Implantation-Induced Defect Engineering for Tuning Diamond Properties

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Shuo Qiao, J F Liu, Jiaqi Wang, Zhangfu Huang, Yusong Wei, Feng Shi

DOI: 10.2139/ssrn.6386071

Cited by: 0

References: 17

Fields of Study & Subjects

Diamond and Carbon-based Materials Research Ion-surface interactions and analysis Silicon Carbide Semiconductor Technologies

References 17