Surface Planarization and Densification of Silicon Nitride Ceramic Films via Bond Regulation for Enhanced Wear Resistance

SSRN Electronic Journal 2026 Preprint Open access

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Authors: Guanqun Hu, Kaisheng Zhang, Tianyu Yang, Rupeng Li, Xisoshi Li, Xiangyu Sun, Ding Zhou, Changning Bai, X. Z. Zhang, Junyan Zhang
DOI: 10.2139/ssrn.6404269
Cited by: 0
References: 26

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced MEMS and NEMS Technologies Force Microscopy Techniques and Applications

Publication details

Journal / source
SSRN Electronic Journal
Publication date
1 January 2026
Language
EN
Document type
Preprint