Toward Automated Plasma Focus Ion Beam Instrument Calibration for Materials Processing [Poster]

OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) 2026 Open access

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Authors: Workforce Development for Teachers and Scientists (WDTS) USDOE Office of Science (SC), Emerson Liu, Madeline Hoffmann, Renae gannon, Steven Spurgeon
DOI: 10.2172/3015015
Cited by: 0
References: 1

Abstract

To accelerate the transition to autonomous focused ion beam (FIB) microscopy, we require an objective figure of merit (FOM) for assessing calibration. For our purposes, these FOMs related to beam astigmatism, quad, and focus. Intelligent calibration integrated into scripted workflows will enable fully automated sample preparation workflows that produce higher quality samples with less operator time.

Fields of Study & Subjects

Advanced Materials Characterization Techniques Ion-surface interactions and analysis Advanced Electron Microscopy Techniques and Applications

Publication details

Journal / source
OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information)
Publication date
22 January 2026
Language
EN