Application of Laser Interferometers in Form Deviation Measurements
Abstract
Abstract. Nowadays, interferometry is very widely used in many areas of science and technology. In metrology of geometrical quantities, interferometers are primarily used in length measurements (e.g. of gauge blocks). Interferometers are also widely used in the diagnostics of machine tools and coordinate measuring machines. However, once the optics are properly configured, interferometers can also measure form deviations. The paper presents the use of a single-beam laser interferometer for straightness measurement.
Fields of Study & Subjects
Advanced Measurement and Metrology Techniques
Optical measurement and interference techniques
Mechanical and Thermal Properties Analysis
Publication details
- Journal / source
- Materials research proceedings
- Volume
- 62
- Pages
- 151–156
- Publication date
- 1 January 2026