Development of Equipment for Aerosol Gas Deposition and Its Application in Film Formation

Materia Japan 2026

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Authors: Eiji Fuchita

DOI: 10.2320/materia.65.175

Cited by: 1

References: 6

Fields of Study & Subjects

Fluid Dynamics and Thin Films Aerosol Filtration and Electrostatic Precipitation Nanomaterials and Printing Technologies

References 6