Alumina Film Formation and Insulating Properties via Advanced Aerosol Gas Deposition
Abstract
Aerosol (Gas) Deposition (AD or AGD) has evolved as a film deposition technique capable of forming dense films at room temperature without heating and melting ceramic powders. This paper reviews the current understanding of the film formation mechanism in AGD (including AD), focusing particularly on alumina film formation. It outlines the effects of raw powder characteristics, deposition conditions, and advancements in deposition equipment on film structure and electrical properties.
Fields of Study & Subjects
Advanced ceramic materials synthesis
Aerogels and thermal insulation
High-Temperature Coating Behaviors
Publication details
- Journal / source
- Journal of the Japan Society of Powder and Powder Metallurgy
- Publisher
- Japan Society of Powder and Powder Metallurgy
- Volume
- 73
- Issue
- 10
- Pages
- 346-354
- Publication date
- 1 January 2026
- Language
- EN