Fast Single Pulse Resolved Laser Induced Breakdown Spectroscopy (spr-LIBS) for In-Line Monitoring of Complete Film Removal in Ni/NiCr Thin-Film Systems
Abstract
An in-line monitoring system for ultra-short pulsed (USP) laser ablation was developed and assessed to two-dimensionally map the complete removal of a thin film.This method enables single pulse resolved monitoring based on Laser Induced Breakdown Spectroscopy (LIBS) for pulse repetition rates of up to 4 MHz.The transition from one 1.5 µm thin layer to another during laser ablation was detected.The mapping with Energy-dispersive X-ray Spectroscopy and our method are in very good agreement.Furthermore, an enhancement of the signal contrast was achieved with GHz bursts.
Fields of Study & Subjects
Laser-induced spectroscopy and plasma
Laser Material Processing Techniques
Laser-Ablation Synthesis of Nanoparticles
Publication details
- Journal / source
- Journal of Laser Micro/Nanoengineering
- Volume
- 21
- Issue
- 1
- Publication date
- 1 February 2026
- Language
- EN