Integrated Circuit Heterogeneous Manufacturing Technology

Advances in engineering research/Advances in Engineering Research 2026 Book chapter Open access

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Authors: Yuxin Li, Zihan Shen
DOI: 10.2991/978-94-6463-986-5_13
Cited by: 2

Fields of Study & Subjects

3D IC and TSV technologies Manufacturing Process and Optimization Silicon and Solar Cell Technologies

Publication details

Journal / source
Advances in engineering research/Advances in Engineering Research
Publisher
Atlantis Press International BV
Pages
109–119
Publication date
1 January 2026
Language
EN
Document type
Book chapter