Optical and mechanical characteristics of aluminum nitride films produced by magnetron sputtering for high-quality SMR resonators

The paper presents the results of a study of internal mechanical stresses and the refractive index of AIN thin films obtained by magnetron deposition at an operating pressure in a vacuum chamber of 0.1 Pa and 0.2 Pa. It is shown that the refractive index of the obtained films increases with an increase in the magnetron discharge power from 400 W to 1000 W at fixed pressures of 0.1 Pa and 0.2 Pa. The obtained values ​​of mechanical stresses in a similar range of discharge power indicate a decrease in internal stresses with an increase in the operating pressure from 0.1 Pa to 0.2 Pa and are in the range from 2.65 GPa to 3.37 GPa and from -0.27 GPa to 1.84 GPa.