Enhancing Soft Defect Localization with Software Automated Intelligent Laser Scanning (SAILS) and Array-Based Image Reconstruction

EDFA Technical Articles 2026

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Authors: Arun Karunanithi, Benny Hsu, Kent Erington, Joseph Caroselli, Winston Gao, Calder Wilson, Aaron Liao
DOI: 10.31399/asm.edfa.2026-1.p016
Cited by: 0

Abstract

Abstract This article demonstrates the successful implementation of software automated intelligent laser scanning (SAILS) its ability to mask out sites in real-time, and use this mask to modulate laser dwell time. The SAILS workflow has the potential to enable soft defect localization, prioritizing both weak and strong sites, offering a more robust and efficient foundation for future advancements in fault-isolation imaging analysis.

Fields of Study & Subjects

Integrated Circuits and Semiconductor Failure Analysis Industrial Vision Systems and Defect Detection Thermography and Photoacoustic Techniques

Publication details

Journal / source
EDFA Technical Articles
Volume
28
Issue
1
Pages
16–20
Publication date
1 February 2026
Language
EN