Chemoresistive Metal Oxide-Based Sensors Synthesized Through Physical Vapor Deposition Techniques for Gas Detection

In our day-to-day lives, we are regularly exposed to a wide spectrum of dangerous gases. Their origins vary, ranging from industrial activities to objects found within our very homes. Naturally, there is an interest in developing cost-efficient and durable devices that can successfully track these gases within our environment. One such candidate is represented by chemoresistive gas sensors based on metal oxides. This is due to their simple architecture and the possibility of scaling down their size, making them valid contenders for future advancements in portable gas sensors. This review focuses on chemoresistive gas sensors that have been obtained through different Physical Vapor Deposition (PVD) methods, which are easily scalable for potential technological transfer towards commercialization or are already exploited at the industrial level, and how varying different deposition parameters impacts the structure of the active material, thus modifying the gas sensing properties of the device. In this review, we report results obtained for different metal oxides: WO3, ZnO, CeO2, TiO2, NiO, and SnO2. The main findings of these studies revealed that the sensor’s response was highly impacted by oxygen deficiencies within the deposited material, the specific surface area, and the thickness of the film. Moreover, this study also delves into different strategies of functionalization that result in improved gas sensing properties. Thus, we herein report how tailoring functional properties modifies the gas sensing performance of different metal oxides.