Enhanced Corrosion Resistance of SUS304 Stainless Steel via Atomic Layer Deposited Al2O3/ZrO2 Nanolaminates
Abstract
Atomic layer deposition (ALD) was employed to fabricate single-layer Al2O3, single-layer ZrO2, and Al2O3/ZrO2 nanolaminate coatings on SUS304 to enhance corrosion protection in chloride-containing environments. All coatings were deposited at 250 °C using optimized self-limiting ALD processes, and the total film thickness was controlled at approximately 54 nm for a fair comparison. Structural characterization revealed that Al2O3 films remained amorphous, whereas ZrO2 films exhibited a thickness-dependent transition from amorphous to crystalline phases. In the nanolaminate structures, thinner ZrO2 sublayers (
Fields of Study & Subjects
Semiconductor materials and devices
Metal and Thin Film Mechanics
Hydrogen embrittlement and corrosion behaviors in metals
Publication details
- Journal / source
- Coatings
- Volume
- 16
- Issue
- 1
- Pages
- 55–55
- Publication date
- 4 January 2026
- Language
- EN