High-Resolution Investigation of the Interfaces in Cathodic Arc Evaporated TiN/CrAlN Multilayer Coatings

Coatings 2026 Open access

Read full text
Authors: Saeideh Naghdali, Helene Waldl, Maximilian Schiester, Markus Pohler, Christoph Czettl, Michael Tkadletz, Nina Schalk
DOI: 10.3390/coatings16040438
Cited by: 1
References: 59

Abstract

TiN/CrAlN multilayer coatings were synthesized by cathodic arc deposition using 2-fold substrate rotation and alternating targets. The effect of substrate rotation on the layer sequence, elemental fluctuations and interface quality was examined using high-resolution transmission electron microscopy and atom probe tomography. The layers exhibited semi-coherent growth across the interfaces. Minor interface roughness and elemental intermixing limited to below 2 nm at the interface could be observed. Further, the formation of a Ti-enriched sublayer in the Cr1−xAlxN as a result of the 2-fold rotation was identified.

Fields of Study & Subjects

Metal and Thin Film Mechanics Advanced Materials Characterization Techniques Surface Treatment and Coatings

Publication details

Journal / source
Coatings
Publisher
MDPI AG
Volume
16
Issue
4
Pages
438–438
Publication date
6 April 2026
Language
EN