Robust Synergistic Control Architecture for High-Frequency Resonance Suppression in Precision Linear Motion Stages

In high-precision positioning applications, lightly damped structural resonances fundamentally limit the achievable performance of precision linear motion stages, enforcing a stringent trade-off between control bandwidth and transient vibration suppression. This paper investigates a unified synergistic control architecture integrating input shaping (IS), feedforward control (FF), and notch filtering (NF) within a feedback framework to jointly mitigate command-induced excitation, compensate predictive dynamics, and suppress narrowband resonant modes. Four representative schemes—FB, FB+NF, FF+FB+NF, and IS+FF+FB+NF—are systematically evaluated through step/ramp responses, sinusoidal tracking, and industrial S-curve trajectory under aggressive operating conditions (up to 2.8 m/s and 160 m/s2). Simulation results show that incorporating IS into the FF+FB+NF baseline effectively eliminates overshoot and suppresses residual vibration, yielding a 22.0% reduction in the ±2 μm settling time. Complementary frequency-domain analyses demonstrate that the proposed IS+FF+FB+NF architecture achieves a superior balance between tracking agility and stability, maintaining robust gain/phase margins while attenuating resonant sensitivity peaks. Robustness studies further indicate that the proposed IS+FF+FB+NF architecture preserves bandwidth consistency despite resonant frequency drifts. Overall, this coordinated integration provides a practically deployable and industrially compatible solution for enhancing vibration suppression and positioning consistency in precision motion systems.