Magnetic Thin Film Inductor Characteristics and Packaging Stress

We investigated how mechanical material properties, magnetic material properties, and geometric structure affect the performance of magnetic inductors.Magnetic thin film samples were prepared using a sputter deposition system.Mechanical properties, including hardness and elastic modulus, were measured with a nanoindenter, while magnetic properties such as saturation magnetization were characterized using a magnetometer.The measured properties were then integrated with finite element simulations to analyze how geometric structure influences magnetic inductor performance sensitivity.The results present the manufacturing process for magnetic thin film preparation and the development of a finite element method for analyzing mechanical and magnetic effects in magnetic inductors.