Effect of Deposition Angle and Arc Current on the Structure and Optical Properties of Ti Coatings Deposited by Cathodic Arc Evaporation

This study investigates the effects of deposition angle and arc current on the surface morphology and optical response of Ti coatings obtained by unfiltered cathodic arc evaporation for spectrally selective solar-thermal applications. 100 nm-thick Ti films were deposited at normal (0°) and oblique (80°) angles of incidence, with arc currents of 65 A and 90 A, respectively. The SEM measurements revealed the characteristic arc-generated microdroplet population. At normal incidence (0°), droplets are predominantly spherical and relatively uniformly distributed, whereas at 80° incidence, many droplets exhibit elongated footprints aligned with the incoming flux from the Ti cathode. This behavior is consistent with oblique-angle deposition (OAD), where the arrival geometry can promote self-shadowing and transient droplet spreading before solidification. AFM confirms an increase in nanoscale roughness, whereas GIXRD indicates nanocrystalline α-Ti and cubic TiO, with maximum crystallinity for 0°/65 A. Contact-angle measurements demonstrate a transition from hydrophobic 316L (~103°) to moderately hydrophilic Ti-coated surfaces (~68–72°), with only minor dependence on deposition geometry. Optical reflectance in the 400–800 nm range is significantly lower for Ti-coated glass and is further reduced for OAD films, indicating enhanced solar absorptance.