Correction: Ye, G.; Yao, Z. Research on the Trajectory and Relative Speed of a Single-Sided Chemical Mechanical Polishing Machine. Micromachines 2025, 16, 450

Micromachines 2026 Open access

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Authors: Guoqing Ye, Zhenqiang Yao

DOI: 10.3390/mi17020160

Cited by: 0

References: 1

Fields of Study & Subjects

Advanced Surface Polishing Techniques Advanced machining processes and optimization Advanced Machining and Optimization Techniques

References 1