Fast Prototyping Ceramic Gas Flow Sensors for Harsh Operating Conditions

Micromachines 2026 Open access

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Authors: Andrey Kasenko, Pavel A. Shchur, Ekaterina A. Drach, Ivan Borzunov, Vasily V. Egorov, Boris Prudnikov, Konstantin Oblov, Arthur Litvinov, Yuriy Voronov, Самотаев Николай Николаевич
DOI: 10.3390/mi17020188
Cited by: 0
References: 15

Abstract

The technology development for the mass ceramic gas flow sensor (CGFS) adopted for harsh operating conditions is presented. The main characteristic of this technology is its simplicity and affordability for mass fast prototyping of CGFS with a limited set of technological equipment. Special attention is paid to the discussion of the technological and operational materials' compatibility, flexibility, and speed of their processing to adapt the best mass flow sensor design option. The CGFS, designed and manufactured in just a few days, was tested in conditions close to the real ones and demonstrated the ability to measure gas flow in the range from 0.21 m/s to 1.25 m/s, with a constant power consumption of 152 mW@346 °C.

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Additive Manufacturing and 3D Printing Technologies Gas Sensing Nanomaterials and Sensors

Publication details

Journal / source
Micromachines
Volume
17
Issue
2
Pages
188–188
Publication date
30 January 2026
Language
EN