Editorial for the Special Issue on MEMS/NEMS Devices and Applications, 3rd Edition

Micromachines 2026 Open access

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Authors: Zhi-Xuan Dai, Takahito Ono, Ching‐Liang Dai
DOI: 10.3390/mi17020205
Cited by: 3
References: 35

Abstract

Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have experienced rapid and sustained development in recent years and have become key enabling technologies for intelligent sensing [...].

Fields of Study & Subjects

Mechanical and Optical Resonators Advanced MEMS and NEMS Technologies Advanced Sensor and Energy Harvesting Materials

Publication details

Journal / source
Micromachines
Publisher
MDPI AG
Volume
17
Issue
2
Pages
205–205
Publication date
2 February 2026
Language
EN