A Thermodynamic Framework for Reliability Kinetics
Abstract
Empirical power-law relationships are widely used in reliability physics to describe degradation kinetics and predict lifetime. Such behavior appears across diverse failure mechanisms, including time-dependent dielectric breakdown (TDDB), hot-carrier injection (HCI), bias temperature instability (BTI), electromigration (EM), and fatigue. In this work, a thermodynamic framework for reliability kinetics is developed from Gibbs free energy and entropy partitioning, leading to a generalized kinetic equation that incorporates thermal activation, stress acceleration, and accumulated degradation. The formulation introduces two parameters: a stress coefficient, γ, which describes the influence of externally applied stress, and a correlation coefficient, χ, which describes how accumulated degradation influences subsequent degradation. Negative values of χ correspond to self-limiting evolution, positive values correspond to self-amplifying evolution, and χ=0 represents statistically independent accumulation. Representative reliability mechanisms are interpreted within this framework, with TDDB approaching independent evolution, HCI exhibiting weak self-limiting behavior, BTI showing strong self-limiting behavior, and fatigue exhibiting self-amplifying behavior. Electromigration illustrates the complementary role of stress acceleration through γ. The proposed framework provides a common thermodynamic interpretation of empirical power-law degradation kinetics and introduces degradation correlation as a complementary descriptor for reliability modeling and lifetime prediction.
Fields of Study & Subjects
Copper Interconnects and Reliability
Semiconductor materials and devices
Reliability and Maintenance Optimization
Publication details
- Journal / source
- Micromachines
- Publisher
- MDPI AG
- Volume
- 17
- Issue
- 7
- Pages
- 817–817
- Publication date
- 7 July 2026
- Language
- EN