Electromechanical and Acoustic Characterization of Dual-Mode Rectangular PMUT

Multifrequency operation in micromachined ultrasonic transducers, enabled by targeted excitation of specific vibrational modes, has emerged as an attractive approach for achieving tunable performance and configurability, well-suited for advanced ultrasound imaging and therapeutic applications. This paper presents a dual-electrode rectangular piezoelectric micromachined ultrasonic transducer (PMUT) designed for efficient dual-frequency operation through mode-selective actuation. The proposed architecture employs segmented electrodes that are spatially aligned with the strain distributions of two distinct flexural modes, enabling selective excitation of Mode 1 (fundamental) and Mode 3 (higher order) through appropriate electrode actuation. Finite element simulations and impedance analysis were used to guide the electrode configuration and validate the mode-selective behavior. The dual-mode PMUT was fabricated alongside a conventional single-electrode PMUT using identical membrane dimensions and material stack for direct comparison. Comprehensive electrical and underwater acoustic characterization confirmed that the conventional PMUT is limited to single-frequency operation at the fundamental resonance. In contrast, the proposed design achieved a substantial improvement in higher-order performance, with a threefold increase in acoustic pressure at Mode 3 compared to the conventional device. These results demonstrate that mode-aligned electrode segmentation enables efficient dual-mode operation without added fabrication complexity, making the design highly suitable for multifrequency ultrasonic applications such as biomedical imaging and sensing.