Constructing (101)-Oriented Anatase TiO2 Seed Layers on Amorphous Microchannel Plate Glass: Surface Energetics and Template-Assisted Oriented Growth

Integrating functional perovskites on an amorphous microchannel plate (MCP) glass faces challenges regarding the lack of ordered nucleation sites and stringent thermal budgets. Herein, we propose a surface energetics-based atomic layer deposition (ALD) strategy to achieve template-assisted oriented BaTiO3 growth via a (101)-oriented anatase TiO2 seed layer. Systematic investigation of the TiCl4/O3 process reveals a kinetic-to-thermodynamic transition at 300 °C, triggering a singular (101) preferred orientation. Combined DFT calculations and Wulff construction elucidate that this texture evolution is governed by a thermally activated surface energy minimization mechanism, driven by the intrinsic stability of the (101) facet. Crucially, the optimized seed layer acts as a multifunctional template: it not only transforms BaTiO3 growth from random polycrystalline morphology to a singular (100) orientation with suppressed bulk carbonate impurities but also ensures excellent conformality and uniformity throughout the high aspect ratio microchannels. This study clarifies the thermodynamic mechanism of oriented growth on amorphous substrates, providing a versatile surface engineering pathway for constructing high-performance MCP-based heterojunction devices.