PCMBA-YOLO: Pinwheel Convolution and Multi-Branch Aided FPN with Shape-IoU for Electroluminescence Defect Detection in Semiconductor Laser Chips

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Authors: Yi-Xiang Wang, Feng Tian, Chuanji Yan, Jianwei Zhou, Jing Zhang, Hualei Shi
Cited by: 2
References: 26

Abstract

To ensure that laser chips meet stringent reliability standards in practical applications, comprehensive limit testing and reliability verification must be performed before deployment. This paper proposes an electroluminescence (EL) imaging-based detection method for Catastrophic Optical Mirror Damage (COMD) and Catastrophic Optical Bulk Damage (COBD). A novel model, PCMBA-YOLO, is developed on the YOLOv12 framework, integrating a Multi-Branch Aided Feature Pyramid Network (MBAFPN) and a Pinwheel Convolution (PConv) structure to enhance weak-signal feature extraction and expand the receptive field with minimal parameters. Furthermore, a Shape-IoU-based regression loss is introduced to model bounding-box shape and scale, improving localization precision and convergence. Experimental results show that PCMBA-YOLO achieves 99.4% mAP@0.5, 97.6% Precision, and 98.7% Recall, with a 14% reduction in parameters compared to the baseline. The proposed method demonstrates superior accuracy, efficiency, and robust generalization, providing a high-performance solution for automated visual inspection in semiconductor manufacturing.

Fields of Study & Subjects

Industrial Vision Systems and Defect Detection Integrated Circuits and Semiconductor Failure Analysis Advanced Optical Sensing Technologies

Publication details

Journal / source
Photonics
Publisher
MDPI AG
Volume
13
Issue
2
Pages
123–123
Publication date
28 January 2026
Language
EN