Monolithically Integrated VCSEL Beam Scanner with Slow-Light Amplifiers for Solid-State LiDAR

The rapidly increasing demand for compact, high-performance beam-steering solutions in LiDAR systems has driven substantial advances in vertical-cavity surface-emitting laser (VCSEL) technologies. In this paper, we present a high-power, ultra-low-divergence VCSEL-based beam scanner array that integrates multi-wavelength seed lasers with extended-length optical amplifiers, thereby simultaneously achieving wide-angle beam steering, near-diffraction-limited beam quality, and watt-class output power. The proposed architecture exploits slow-light modes supported by laterally extended VCSEL waveguides incorporating precisely engineered surface gratings. This design enables fully electronic beam steering over an angular range exceeding 30°, with an angular resolution surpassing 1600 resolvable points. Systematic characterization of seed lasers with distinct grating periods confirms robust single-mode operation and yields a cumulative wavelength tuning range exceeding 22 nm. When integrated with optical amplifiers up to 6 mm in length, the system achieves a record-low beam divergence of 0.018°, approaching the theoretical diffraction limit. Under continuous-wave operation and without active thermal management, the device delivers output powers exceeding 1.6 W. By overcoming the long-standing trade-offs among steering range, beam quality, and output power, this work establishes a transformative paradigm for compact VCSEL-based beam-steering systems and represents a significant step toward next-generation solid-state LiDAR technologies.