Measurement of the Surface Spacing of Optical Components Based on Low-Coherence Four-Quadrant Envelope Detection

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Authors: Xiaoqin Shan, Zhigang Han, Rihong Zhu
Cited by: 0
References: 24

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Abstract

A four-quadrant low-coherence envelope detection method was proposed for measuring the surface spacing of optical components, eliminating the requirement for precise control of the delay line scanning step to generate a π/2 phase shift. The method employs an orthogonal polarization Mach–Zehnder (MZ) fiber interferometer, illuminated by a broadband superluminescent diode (SLD), and a four-quadrant polarization-resolved detector to simultaneously acquire spatially phase-shifted interference signals carrying surface spacing information. The interference envelope is directly demodulated to extract surface spacing, thereby decoupling measurement accuracy from mechanical stepping constraints. To enable real-time, high-precision calibration of the delay line, two complementary schemes were implemented: wavelength division multiplexing (WDM)-based calibration and dual optical path calibration. Experimental results confirm that the dual-path scheme exhibits weak dependence on scanning velocity and remains stable across a wide speed range. Repeat measurements of the surface spacing of a 1 mm thick sapphire plate yielded a standard deviation (STD) of 1.3 μm. By relaxing the strict π/2 phase shift condition traditionally imposed on scanning step size, this method improves operational efficiency while maintaining measurement reliability—providing a robust and broadly applicable solution for metrology, including lens surface spacing and transparent plate thickness characterization.

Fields of Study & Subjects

Optical measurement and interference techniques Advanced Measurement and Metrology Techniques Semiconductor Lasers and Optical Devices

Publication details

Journal / source
Photonics
Volume
13
Issue
3
Pages
281–281
Publication date
15 March 2026
Language
EN