PiezoMEMS Fabrication on Flexible Stainless-Steel Substrates
Abstract
A bottom-up fabrication approach for flexible piezoelectric micromachined ultrasound transducer (PMUT) arrays on stainless-steel substrates was developed. Devices were fabricated using chemical solution deposition of a 700 nm-thick layer of Pb0.99□0.01(Zr0.52Ti0.48)Nb0.02O3, where □ denotes a vacancy on the Pb site, on 50 μm-thick LaNiO3/HfO2/stainless-steel foils. Lithography for definition of the electrode and piezoelectric layers was completed on the front of the wafer. Ni electroplating on the back side of the foil was used to create locally stiff areas to define the deflection area. PMUT devices were successfully fabricated using this method. The permittivity and loss tangent of the fabricated device at 1 kHz were 283 ± 9 and
Fields of Study & Subjects
Ultrasound Imaging and Elastography
Ferroelectric and Piezoelectric Materials
Piezoelectric Actuators and Control
Publication details
- Journal / source
- Sensors
- Publisher
- MDPI AG
- Volume
- 26
- Issue
- 7
- Pages
- 2246–2246
- Publication date
- 5 April 2026
- Language
- EN