A Review of the Transition from Industry 4.0 to Industry 5.0: Unlocking the Potential of TinyML in Industrial IoT Systems

The integration of artificial intelligence into the Industrial Internet of Things (IIoT), supported by edge computing architectures, marks a new paradigm of intelligent automation. Tiny Machine Learning (TinyML) is emerging as a key technology that enables the deployment of machine learning models on ultra-low-power devices. This study presents a systematic review of 110 peer-reviewed publications (2020–2025) identified from Scopus, Web of Science, and IEEE Xplore following the PRISMA protocol. Bibliometric and thematic analyses were conducted using Biblioshiny and VOSviewer to identify major trends, architectural approaches, and industrial applications of TinyML. The results reveal four principal research clusters: edge intelligence and energy efficiency, federated and explainable learning, human-centric systems, and sustainable resource management. Importantly, the surveyed industrial implementations report measurable gains—typically reducing inference latency to the millisecond range, lowering on-device energy cost to the sub-milliwatt regime, and sustaining high task accuracy, thereby substantiating the practical feasibility of TinyML in real IIoT settings. The analysis indicates a conceptual shift from engineering- and energy-focused studies toward cognitive, ethical, and security-oriented perspectives aligned with the principles of Industry 5.0. TinyML is positioned as a catalyst for the transition from automation to cognitive autonomy and as a technological foundation for building energy-efficient, ethical, and sustainable industrial ecosystems.